XHR SEM
Our Magellan system is equipped with unique UNICUP electron source enabling monochromated highly coherent electron beam producing sub-nanometer spot on a sample surface. For better beam confinement and higher singal collection efficiency optical system of the microscope includes magnetic immersion lens. Beam decelerator (negative bias at microscope stage) is included for flexible handling of beam-specimen interaction volume that allows beam landing energy as low as 50 V only. At such low excitation energy, the interaction volume is confined to a few nanometers thus enabling surface sensitive imaging and accurate acquisition of tiny topography.
Thermo Fisher Scientific | Site
Edmond J. Safra (Givat-Ram)
Nano Center
Contacts
- Inna Popov
- innap@savion.huji.ac.il