RGA
RGA analisys up to 300C
- Check-out of unknown samples prior vacuum processing, annealing under special conditions
- DC plasma cleaning under special conditions
RGA Analysis (Residual Gas Analysis):RGA refers to the technique used to analyze gases present in a vacuum system, typically employed in environments such as semiconductor manufacturing, material science, or high-vacuum research. This analysis helps identify the types and quantities of gases (such as water vapor, oxygen, nitrogen, hydrocarbons, etc.) that might be present in the vacuum before conducting further processing, such as annealing or plasma treatments.
RGA | Site
Edmond J. Safra (Givat-Ram)
Nano Center
Contacts
- Golan Tanami
- golant@savion.huji.ac.il