Probe Station
The Probe Station serves as an advanced platform for precise electro-optical characterization and electrical measurements of semiconductor devices at micro- and nanoscale dimensions. The system utilizes microscopic probes to establish electrical contact with the Device Under Test (DUT) at highly accurate three-dimensional positions, enabling measurements such as four-point probe surface resistivity, current-voltage (I-V) characterization, capacitance-voltage (C-V) profiling, and pulsed I-V/C-V analysis for thermally sensitive components.Equipped with a high-magnification optical microscope, precise temperature control ranging from ambient to critical test conditions, and electro-mechanical or piezoelectric positioning systems, the Probe Station allows stable and reproducible measurement environments. Its applications are central to the research and development of field-effect transistors (FETs), diodes, microelectromechanical systems (MEMS), and integrated circuits (ICs), as well as in failure analysis and process optimization at the nanometer scale.
Center for Nanoscience and Nanotechnology | Site
Edmond J. Safra (Givat-Ram)
Nano Center
Contacts
- Golan Tanami
- golant@savion.huji.ac.il